JPH0379423U - - Google Patents
Info
- Publication number
- JPH0379423U JPH0379423U JP14088789U JP14088789U JPH0379423U JP H0379423 U JPH0379423 U JP H0379423U JP 14088789 U JP14088789 U JP 14088789U JP 14088789 U JP14088789 U JP 14088789U JP H0379423 U JPH0379423 U JP H0379423U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- rotating
- closed
- openable
- rotating shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
Landscapes
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14088789U JPH0744014Y2 (ja) | 1989-12-05 | 1989-12-05 | 半導体製造装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14088789U JPH0744014Y2 (ja) | 1989-12-05 | 1989-12-05 | 半導体製造装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0379423U true JPH0379423U (en]) | 1991-08-13 |
| JPH0744014Y2 JPH0744014Y2 (ja) | 1995-10-09 |
Family
ID=31687828
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14088789U Expired - Fee Related JPH0744014Y2 (ja) | 1989-12-05 | 1989-12-05 | 半導体製造装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0744014Y2 (en]) |
-
1989
- 1989-12-05 JP JP14088789U patent/JPH0744014Y2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0744014Y2 (ja) | 1995-10-09 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |